High- $Q$ UHF Spoke-Supported Ring Resonators
نویسندگان
چکیده
منابع مشابه
UHF High-Order Radial-Contour-Mode Disk Resonators
A micromechanical, laterally vibrating disk resonator, fabricated via a technology combining polysilicon surface-micromachining and metal electroplating to attain submicron lateral capacitive gaps, has been demonstrated at frequencies as high as 829 MHz and with Q’s as high as 23,000 at 193 MHz. Furthermore, the resonators have been demonstrated operating in the first three radial contour modes...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2016
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2015.2480395